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  • 1
    ISSN: 0032-3888
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Conducting polyaniline is found to be suitable for several lithographic applications. With the use of onium salts, polyaniline is made radiation sensitive and shown to be a high resolution conducting photo and electron-beam resist. Conducting lines of 0.25 μm have been patterned with e-beam irradiation. Thin films of conducting polyaniline are found to be effective discharge layers for e-beam lithography. Insulating resist systems charge during e-beam exposure, which results in pattern displacements. When polyaniline is used as a conducting layer below the imaging resist, no pattern displacements are observed. Polyaniline is also shown to eliminate charging during the high resolution inspection and dimensional measurements of X-ray and optical masks by scanning electron microscopy (SEM) when used as a coating on top of the mask. In addition, polyaniline can be used for electrolytic and electroless type metallization processes.
    Additional Material: 8 Ill.
    Type of Medium: Electronic Resource
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