Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract In the present paper the mixing of thin metal layers on silicon or copper substrates induced by HIPIB (High Intensituy Pulsed Ion Beams) was investigated using a device which delivers mainly protons with a maximum ion energy of E 0=250 keV, a pulse length of τ=50 ns, and an energy density per pulse of 3 J/cm2. The temperature distribution in the samples which was evaluated by solving the one-dimensional heat-flow equation indicates that 1 μm layers are heated well above the melting point. The samples were analysed by RBS (Rutherford Backscattering Spectrometry), SNMS (Sputtered Neutral Mass Spectrometry), X-ray diffraction and a microprobe. If the surface tension of the molten layer is larger than the one of the substrate, the layer material is splashed off. Chromium layers on copper are completely mixed after irradiation by a few shots and a considerable hardening of the surface is observed.
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