Polymer and Materials Science
Wiley InterScience Backfile Collection 1832-2000
Electrical Engineering, Measurement and Control Technology
β-Co/Ga and Mn/Ga alloys have been deposited on various substrates by laser direct write chemical vapour deposition (LCVD) from novel single-source precursors. The preformed alloy stoichiometry of 1:1 defined by the metal ratio of the precursors, (CO)4Co-GaEt2(NMe3) (1) and (CO)5Mn-GaEt2(NMe3) (2), is retained within the deposited structures. The depositions were up to 1.5 μm thick and the lateral dimension (4 μm) was determined by the diameter of the laser focus. The deposited structures were contaminated with ∼10 at. % C and O (by AES).
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