Wiley InterScience Backfile Collection 1832-2000
Chemistry and Pharmacology
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Spun-on contour coating properties are characterized for two absorptive undercoats, AUCs, and a contrast-enhanced layer, CEM-388. A low-pass frequency filter contour modeling procedure is used to simulate the coating contours on a real silicon-on-sapphire epi-island layout. The computed thickness variations are used to estimate the variation in optical densities of these spun-on films on the topography. The variations in optical densities arc discussed in terms of the expected dimensional deviations introduced into the patterned resist layer. At the same spun-on thickness, one absorptive undercoat offers improvement in dimensional control when compared to the other. Changes in the thickness of the CEM-388 layer may also introduce significant dimensional deviations in the underlying positive resist layer. In, both cases the more conformal spun-on contour coating properties produce improved resist imaging.
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