Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
Filter
  • 2015-2019  (1)
  • 1990-1994  (3)
Collection
Years
Year
  • 1
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A material for thermally stable self-aligned silicide technologies has been developed using sequentially deposited Ti/Ta on polycrystalline silicon. At lower annealing temperatures below 1000 °C two separate phases were found by cross-sectional transmission electron microscopy to exist in the form of bilayer TiSi2/TaSi2. The formation of a ternary phase (TiTa)Si2 has been observed at a higher temperature of 1000 °C. Consequently, the ternary (TiTa)Si2 layer could be kept extremely flat, with a sheet resistance of 5 Ω/(D'Alembertian), even after 1000 °C, 30 min annealing. Cross-sectional transmission electron micrographs of the structure clearly reveal that no agglomeration occurs during the heat treatment.
    Type of Medium: Electronic Resource
    Signatur Availability
    BibTip Others were also interested in ...
  • 2
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Oxygen diffusion/incorporation behaviors of TiN/Ti/Si structures after thermal annealing in nitrogen ambients have been studied by x-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy measurements. At the interface between Ti and TiN, titanium dioxides, thermodynamically most stable, are formed as a consequence of grain boundary diffusion, while inside TiN layer the contents of TiO and Ti2O3 compounds increases as the annealing temperature increases. At the interface between Ti and Si, titanium silicide formation is observed in the samples annealed above 450 °C consuming a part of pure Ti layer. One thing to note is that a severe blistering is observed in a sample annealed at 600 °C, probably caused by the difference of thermal expansion coefficients between TiSi2 and TiO2.
    Type of Medium: Electronic Resource
    Signatur Availability
    BibTip Others were also interested in ...
  • 3
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The formation of titanium silicides on Si implanted with different BF2+ dosages has been studied by secondary ion mass spectrometry and transmission electron microscopy measurements. The thickness of the silicide layer formed in the temperature ranging from 600 to 800 °C has been investigated as a function of the implanted BF2+ dosage up to 1×1016 cm−2. Annealing at 700 °C results in conversion of the titanium film into predominantly C49 TiSi2, and most of it is transformed into the C54 phase at 800 °C or higher, resulting in a lower sheet resistance (16 μΩ cm). The titanium silicide thickness formed after the rapid thermal annealing (RTA) treatment depends on the implanted BF2+ dosage, caused by the native oxide enhanced by increased damage. Boron is redistributed into the silicide layer up to the solid solubility limit during annealing, leading to an accumulation at the silicide/silicon interface. The lowest contact resistance (with a size of 0.7 μm×0.7 μm) of 35 Ω is obtained at the annealing temperature of 700 °C.
    Type of Medium: Electronic Resource
    Signatur Availability
    BibTip Others were also interested in ...
  • 4
    Publication Date: 2018-10-02
    Description: Purpose: To develop a radiomics signature based on preoperative MRI to estimate disease-free survival (DFS) in patients with invasive breast cancer and to establish a radiomics nomogram that incorporates the radiomics signature and MRI and clinicopathological findings. Experimental Design: We identified 294 patients with invasive breast cancer who underwent preoperative MRI. Patients were randomly divided into training ( n = 194) and validation ( n = 100) sets. A radiomics signature (Rad-score) was generated using an elastic net in the training set, and the cutoff point of the radiomics signature to divide the patients into high- and low-risk groups was determined using receiver-operating characteristic curve analysis. Univariate and multivariate Cox proportional hazards model and Kaplan–Meier analysis were used to determine the association of the radiomics signature, MRI findings, and clinicopathological variables with DFS. A radiomics nomogram combining the Rad-score and MRI and clinicopathological findings was constructed to validate the radiomic signatures for individualized DFS estimation. Results: Higher Rad-scores were significantly associated with worse DFS in both the training and validation sets ( P = 0.002 and 0.036, respectively). The radiomics nomogram estimated DFS [C-index, 0.76; 95% confidence interval (CI); 0.74–0.77] better than the clinicopathological (C-index, 0.72; 95% CI, 0.70–0.74) or Rad-score–only nomograms (C-index, 0.67; 95% CI, 0.65–0.69). Conclusions: The radiomics signature is an independent biomarker for the estimation of DFS in patients with invasive breast cancer. Combining the radiomics nomogram improved individualized DFS estimation. Clin Cancer Res; 24(19); 4705–14. ©2018 AACR .
    Print ISSN: 1078-0432
    Electronic ISSN: 1557-3265
    Topics: Medicine
    Signatur Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...