Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract Fine powder and highly oriented thin film TiS2 were prepared by a reaction between TiCl4 and H2S in low-pressure glow discharge at low substrate temperatures (≦450°C). The products were investigated by changing the reaction conditions, e.g. the substrate temperature, the applied rf power between electrodes, and the reactant ratio ([H2S]/[TiCl4]). The fine powder product was an aggregate of plate-like crystallites of some ten nm in width and less than ten nm in thickness. Lithium batteries using the fine TiS2 powder showed a flat discharge voltage around 2.2 V up to 100% utilization. Submicron TiS2 crystallites had their lattice planes perpendicular to the substrate in the thin films having thicknesses greater than 1 μm. This orientation is expected to be favorable for the application to lithium rechargable batteries.
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