Springer Online Journal Archives 1860-2000
Electrical Engineering, Measurement and Control Technology
Abstract The vapor pressures of theβ-diketonates Y(THD), Ba(THD), and Cu(THD), commonly used as precursors for MOVPE of YBa2Cu3O7, and Y(MCP) were measured at different temperatures. A time-resolved static method recording the pressure vs. time at constant temperature was used, permitting us to deduce the vapor pressure even if the materials tend to decompose. The values of the constants of the Clausius-Clapeyron equation log10p(T)/p 0=A-B/T are,A=11.7, 8.7, 8.27, 16.6 andB=4359, 2654, 3602, and 6453 K for Y(THD), Y(MCP), Ba(THD), and Cu(THD), respectively withp 0= 1 Pa and temperatureT in K. The thermal stability of the sources was measured and are discussed.
Type of Medium: