Springer Online Journal Archives 1860-2000
Chemistry and Pharmacology
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract Plasma polymerization of tetramethysilane was studied in terms of file reactivity of silylmethyl groups. Two different plasma experiments have been carried out. The first was involved in trapping of low-molecular-weight conversion products of file monomer, and the second was used for deposition of polymer film. Gas chromatograplty/ mass spectrometry examination of file trapped material correlated with infrared analysis of the polymer film revealed that silymethyl groups undergo a variety of plasma reactions producing Si-Si, Si-CH2-Si, Si-CH2-CH2-Si, SiHx and SiEt units. The identified low-molecular-freight products show that the formation of SiHx and Si-CH2-Si units are predominant plasma reactions q/ file silylmetlml groups.
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