Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
3 . Its fabrication is based on techniques used in microsystem processing and in particular anisotropic etching, thin film deposition, electroplating, and anodic bonding. The mass spectrometer consists of a plasma electron source for measurand ionisation as well as an ion optic and a mass separator specifically designed for the system’s small dimensions.
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